公开(公告)号：US3603646A

公开(公告)日：1971-09-07

申请号：US3603646D

申请日：1970-01-26

Applicant: IBM

Inventor： LEOFF ARKADY

IPC: B65G11/20 ,  B60V3/04 ,  B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/677 ,  B65G51/02 ,  B65G53/04 ,  B65G53/20

CPC classification number: H01L21/67784 ,  B65G51/03

Abstract: A gravity-type air slide is provided with a series of spaced vacuum holds with a differential vacuum switch in the vacuum supply circuit allowing self-controlled feed of wafers sequentially from one vacuum hold to another along the slide. An inspection station comprising a revolving pedestal with a porous support surface may be placed adjacent to one of the vacuum holes and coupled selectively to positive air pressure or to vacuum pressure by a switch over valve which is also controlled by the differential vacuum switch. The wafer becomes part of the revolving pedestal and inspection is performed on it. Afterwards, the wafer is released from the pedestal and continues along the air slide path by gravity.

公开(公告)号：US3588176A

公开(公告)日：1971-06-28

申请号：US3588176D

申请日：1968-11-13

Applicant: IBM

Inventor： BYRNE THOMAS M ,  LEOFF ARKADY

IPC: B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/677 ,  B65G53/04 ,  B65G53/00

CPC classification number: B65G51/03 ,  H01L21/67784

Abstract: AN ARTICLE IS TRANSPORTED THROUGH AN ENCLOSED DUCT BY BEING ADVANCED SEQUENTIALLY FROM ONE TO ANOTHER OF A PLURALITY OF STATIONS. THE ARTICLE IS SUSPENDED WITHIN THE DUCT BY AN AIR FILM IN THE DUCT. THE ARTICLE IS ADVANCED FROM ONE STATION TO THE NEXT ADJACENT STATION BY PRODUCING A PRESSURE DIFFERENTIAL BETWEEN THE TWO STATIONS. TO PREVENT OVERTRAVEL OF THE ARTICLE BEYOND THE NEXT ADJACENT STATION TO WHICH IT IS ADVANCED, A VACUUM BRAKE MAY BE UTILIZED ADJACENT EACH OF THE STATIONS.

公开(公告)号：DE1956273A1

公开(公告)日：1970-05-21

申请号：DE1956273

申请日：1969-11-08

Applicant: IBM

Inventor： MARTIN BYRNE THOMAS ,  LEOFF ARKADY

IPC: B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/677 ,  B65G53/04

Abstract: 1,268,913. Pneumatic conveyers. INTERNATIONAL BUSINESS MACHINES CORP. 16 Oct., 1969 [13 Nov., 1968], No. 50864/69. Heading B8A. A system for advancing articles 11 through an enclosed duct 10, sequentially from one to another of a plurality of stations 18 to 22, comprises establishing an air pressure differential between adjacent stations, whereby an air flow is generated within the duct to convey the articles therealong on a cushion of air supplied through a permeable base 12 of the duct. The latter can be divided into segments by air-tight gates 32 to 35 and the end plates of the duct, each segment being associated with a valve controlled opening 18 to 21 and a pressure air inlet 40 to 43, apart from the downstream end segment which is associated with an opening 22 only. The pneumatic valves 24 to 27 for the openings 18 to 21, the pneumatic valves controlling the gates 32 to 35, and the supply of air to inlets 40 to 43 are automatically operated in sequence through a photo-electric device sensing the movement of the articles 11. In operation, in the condition shown in Fig. 1, segments are formed by the alternate gates 33, 35 and an article is positioned at the upstream end of each segment, the article adjacent opening 18 having been just inserted therethrough into the system and the article adjacent opening 22 being ready for removal from the system. With supply of pressure air at 40 and 42, the articles move along the duct from closed openings 18, 20 to open openings 19, 21, any overshoot of the articles being minimized by the increasing air pressure in the duct between the openings 19, 21 and the gates 33, 34, as generated by the air passing through the duct base 12. The other alternate gates 32, 34 are then used to form segments, and with similar use of the associated valved openings and air pressure supplies, the articles are further advanced along the duct. A photo-electric controlled vacuum pump may be associated with each opening to positively brake the article thereat. In an alternative arrangement the air pressure supply is dispensed with and the pressure differential along the duct created only by the air permeating through the duct base.

公开(公告)号：DE2364790A1

公开(公告)日：1974-07-04

申请号：DE2364790

申请日：1973-12-27

Applicant: IBM

Inventor： ARONSTEIN JESSE ,  HARDING WILLIAM EUGENE ,  LEOFF ARKADY ,  MURPHY JOHN JOSEPH ,  RUDER WINFIELD SCOTT ,  ZEISS PHILIP MORRIS

IPC: H01L21/00 ,  H01L21/677 ,  H01L21/683 ,  B23Q41/02 ,  H01L7/68

公开(公告)号：AU6308273A

公开(公告)日：1975-06-05

申请号：AU6308273

申请日：1973-11-30

Applicant: IBM

Inventor： RUDER WINFRIELD SCOTT ,  LEOFF ARKADY ,  ZEISS PHILIP MORRIS ,  MURPHY JOHN JOSEPH ,  ARONSTEIN JESSE ,  HARDING WILLIAM EUGENE

IPC: H01L21/00 ,  H01L21/677 ,  H01L21/683 ,  H01L7/68

公开(公告)号：CA1013050A

公开(公告)日：1977-06-28

申请号：CA188760

申请日：1973-12-21

Applicant: IBM

Inventor： ARONSTEIN JESSE ,  LEOFF ARKADY ,  MURPHY JOHN J ,  RUDER WINFIELD S

IPC: B25J9/16 ,  B23Q41/02 ,  B66C13/22 ,  H01L21/00 ,  H01L21/677

Abstract: A material transfer apparatus which includes a carriage whose movement is controlled along a path between specified locations thereon. The carriage includes means for dynamically indicating its present location on the path which is compared with a specified new location to provide a difference drive for moving the carriage as required. When a new location for the carriage is specified, it is dispatched under control of a cross-positioning means to approximate location of the new position whereby a sensing means on the carriage senses the carriage's approach to an indicator at the specified location, whereby control of the movement of the carriage is transferred to a fine positioning drive to accurately register the carriage with the specified location along the track.

公开(公告)号：DE2364238A1

公开(公告)日：1974-07-11

申请号：DE2364238

申请日：1973-12-22

Applicant: IBM

Inventor： ARONSTEIN JESSE ,  LEOFF ARKADY ,  MURPHY JOHN JOSEPH ,  RUDER WINFIELD SCOTT

IPC: B25J9/16 ,  B23Q41/02 ,  B66C13/22 ,  H01L21/00 ,  H01L21/677 ,  G05D3/04

Abstract: A material transfer apparatus which includes a carriage whose movement is controlled along a path between specified locations thereon. The carriage includes means for dynamically indicating its present location on the path which is compared with a specified new location to provide a difference drive for moving the carriage as required. When a new location for the carriage is specified, it is dispatched under control of a cross-positioning means to approximate location of the new position whereby a sensing means on the carriage senses the carriage's approach to an indicator at the specified location, whereby control of the movement of the carriage is transferred to a fine positioning drive to accurately register the carriage with the specified location along the track.