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公开(公告)号：AU6308273A
公开(公告)日：1975-06-05
申请号：AU6308273
申请日：1973-11-30
Applicant: IBM
Inventor： RUDER WINFRIELD SCOTT , LEOFF ARKADY , ZEISS PHILIP MORRIS , MURPHY JOHN JOSEPH , ARONSTEIN JESSE , HARDING WILLIAM EUGENE
IPC: H01L21/00 , H01L21/677 , H01L21/683 , H01L7/68
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