公开(公告)号：JPH06184601A

公开(公告)日：1994-07-05

申请号：JP11119393

申请日：1993-04-15

Applicant: IBM

Inventor： SANGU KUUON KANGU ,  SANPASU PURUSHIYOSAMAN ,  JIYON JIEIMUSU RITSUKO ,  JIEEN MAAGARETSUTO SHIYOU ,  SABUHASHIYU RAKUSUMAN SHINDO

IPC: B01F3/18 ,  B22F1/00 ,  B22F9/04 ,  C22C1/10 ,  H05K1/09

Abstract: PURPOSE: To provide a method of producing a powder of metal particles containing grain growth control additives. CONSTITUTION: A powder of metal particles, such as copper particles, is mixed with a powder of additive particles, such as alumina particles. The resultant mixture is subjected to high energy ball milling to obtain the metal particles where the additive particles are substantially uniformly dispersed. The ball milled powder contains elongated high aspect ratio particles. The high aspect ratio particles are reduced in size by jet impact milling. The jet impact milled powder has particles of sufficiently small size to fill a via between metallization layers constituting the green ceramic precursor to a ceramic substrate. When a combination of ceramic precursor and conductor forming paste is sintered, the grain growth control additive results in a substantially void free via filled with metal having a fine grain morphology.