-
公开(公告)号:DE2303410A1
公开(公告)日:1973-10-31
申请号:DE2303410
申请日:1973-01-24
Applicant: IBM
Inventor: ALTMAN CARL , CHAPMAN SYDNEY GEORGE , SATYA A VENKATA SURYA
IPC: H01L29/872 , H01L21/00 , H01L21/263 , H01L21/285 , H01L29/00 , H01L29/47 , H01L9/00
公开(公告)号:DE2303410A1
公开(公告)日:1973-10-31
申请号:DE2303410
申请日:1973-01-24
Applicant: IBM
Inventor: ALTMAN CARL , CHAPMAN SYDNEY GEORGE , SATYA A VENKATA SURYA
IPC: H01L29/872 , H01L21/00 , H01L21/263 , H01L21/285 , H01L29/00 , H01L29/47 , H01L9/00