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公开(公告)号:DE2225665A1
公开(公告)日:1973-01-11
申请号:DE2225665
申请日:1972-05-26
Applicant: IBM
Inventor: DRUSCHEL WILLIAM OTTO , KARSCH ARTHUR FREDERICK , SCHNEIDER JUN WILLIAM CLARK
IPC: G03F1/72 , H01L21/00 , H05K3/00