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公开(公告)号：DE2708954A1
公开(公告)日：1977-10-06
申请号：DE2708954
申请日：1977-03-02
Applicant: IBM
Inventor： CACCOMA GEORGE ANTHONY , CASTRUCCI PAUL PHILIP , DRUSCHEL WILLIAM OTTO
IPC: B23Q41/00 , G01R31/26 , G01R31/28 , G05B19/418 , G06F19/00 , H01L21/677 , H01L21/68 , H01L21/64
Abstract: A computer controlled manufacturing system employing random access semiconductor wafer storage in the fabrication of integrated circuit devices.
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公开(公告)号：DE2626528A1
公开(公告)日：1976-12-30
申请号：DE2626528
申请日：1976-06-14
Applicant: IBM
Inventor： DRUSCHEL WILLIAM OTTO , GARDINEER JUN BAYARD GILBERT , MANNING STANLEY ARTHUR , MUSITS BELA
IPC: B65G49/07 , B65G51/03 , H01L21/677 , B65G47/74
Abstract: A portable carrier for a semiconductor wafer is detachably connected to an air slide so that the wafer can be propelled from the carrier to the air slide and vice versa by air from the air slide. The carrier has a chamber with an air slide base on which the wafer is supported by air from the air slide when the wafer is to be propelled into or out of the chamber. The carrier has a single wafer port, which is sealed except when the carrier is connected to the air slide, through which the wafer enters or exits when propelled by air from the air slide. When the carrier chamber is sealed, the wafer is retained in position within the chamber by retaining means, which are rendered ineffective when the wafer is to be propelled into or out of the chamber.
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公开(公告)号：AU2334777A
公开(公告)日：1978-09-21
申请号：AU2334777
申请日：1977-03-17
Applicant: IBM
Inventor： CACCOMA GEORGE ANTHONY , CASTRUCCI PAUL PHILIP , DRUSCHEL WILLIAM OTTO
IPC: B23Q41/00 , G01R31/26 , G01R31/28 , G05B19/418 , G06F19/00 , H01L21/677 , H01L21/68 , G06F15/20 , G06F15/46 , G06F13/06 , H01L21/70
Abstract: A computer controlled manufacturing system employing random access semiconductor wafer storage in the fabrication of integrated circuit devices.
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