Abstract:
PROBLEM TO BE SOLVED: To provide a micro-electromechanical system (MEMS) variable capacitor where movable comb type drive electrodes with opposite polarities are simultaneously manufactured on the same substrate, which operate independently. SOLUTION: These electrodes are formed as an interdigital structure so as to maximize electrical capacitance. To assure that a varactor does not fail as the result of stress that possibly separates a dielectric material from a conductive element, this MEMS variable capacitor contains a CMOS manufacturing step combined with an elastomeric material selectively used in a region where stress is maximum. Combining this CMOS process and a conductive elastomeric material between vias increases an overall sidewall region, thus increasing electrical capacitance density. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
An integrated circuit chip packaging structure, preferably having a semiconductor base substrate (1), i.e., silicon or gallium arsenide, alternating insulation and conductive layers on the base structure, at least two conductive layers (8) being patterned into thin film wiring (i.e., thin film copper of approximately 5 microns), semiconductor integrated circuit chips connected to the upper-most patterned conductive layer, and means to connect the packaging structure to the next level of packaging (i.e., board or card). The thin film wiring layers typically each have coplanar ground, power (39, 40) and signal lines (19, 20), with at least one power (16) or ground line existing between coplanar signal lines to minimize cross talk. To facilitate efficient power distribution, lines of specific power levels of the patterned planes are connected to lines of the same power level on other patterned planes to form three dimensional power planes. To reduce package capacitance and keep the RC constant low, a personalized reference plane is incorporated. The personalized plane has insulating regions extending at least partially through the plane at predetermined locations that coincide with long signal lines on the wiring layers. The combined package provides a packaging alternative that has excellent electrical performance (i.e., speed, low RC constant, efficient power distribution), high density and thermal expansion matching between the underlying semiconductor structure and semiconductor chips mounted on the package. A high yield process for manufacturing the package is also disclosed.
Abstract:
MODULE FOR PACKAGING SEMICONDUCTOR INTEGRATED CIRCUIT CHIPS ON A BASE SUBSTRATE An integrated circuit chip packaging structure, preferably having a semiconductor base substrate, i.e., silicon or gallium arsenide, alternating insulation and conductive layers on the base structure, at least two conductive layers being patterned into thin film wiring (i.e., thin film copper of approximately 5 microns), semiconductor integrated circuit chips connected to the upper-most patterned conductive layer, and means to connect the packaging structure to the next level of packaging (i.e., board or card). The thin film wiring layers typically each have coplanar ground, power and signal lines, with at least one power or ground line existing between coplanar signal lines to minimize cross talk. To facilitate efficient power distribution, lines of specific power levels of the patterned planes are connected to lines of the same power level on other patterned planes to form three dimensional power planes. To reduce package capacitance and keep the RC constant low, a personalized reference plane is incorporated. The personalized plane has insulating regions extending at least partially through the plane at predetermined locations that coincide with long signal lines on the wiring layers. The combined package provides a packaging alternative that has excellent electrical performance (i.e., speed; low RC constant, efficient power distribution), high density and thermal expansion matching between the underlying semiconductor structure and semiconductor chips mounted on the package. A high yield process for manufacturing the package is also disclosed.