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公开(公告)号:US3770516A
公开(公告)日:1973-11-06
申请号:US3770516D
申请日:1972-01-12
Applicant: IBM
Inventor: DUFFY M , SCHUMANN P , YEH T
IPC: H01L21/00 , H01L21/74 , H01L21/761 , H01L21/8222 , H01L27/00 , H01L7/54
CPC classification number: H01L21/00 , H01L21/743 , H01L21/761 , H01L21/8222 , H01L27/00
Abstract: Monolithic integrated circuits are made utilizing various ion implantation techniques for making diodes, transistors, resistors, capacitors, underpass connections, sub-collector junctions, etc., and for altering impurity profiles, gold doping, trimming resistance values, altering junctions depth, and isolating regions.
Abstract translation: 使用各种离子注入技术制造单片集成电路,用于制造二极管,晶体管,电阻器,电容器,地下通道连接,子集电极结等,并且用于改变杂质分布,金掺杂,修整电阻值,改变接合深度和隔离 地区。