公开(公告)号：US3770516A

公开(公告)日：1973-11-06

申请号：US3770516D

申请日：1972-01-12

Applicant: IBM

Inventor： DUFFY M ,  SCHUMANN P ,  YEH T

IPC: H01L21/00 ,  H01L21/74 ,  H01L21/761 ,  H01L21/8222 ,  H01L27/00 ,  H01L7/54

CPC classification number: H01L21/00 ,  H01L21/743 ,  H01L21/761 ,  H01L21/8222 ,  H01L27/00

Abstract: Monolithic integrated circuits are made utilizing various ion implantation techniques for making diodes, transistors, resistors, capacitors, underpass connections, sub-collector junctions, etc., and for altering impurity profiles, gold doping, trimming resistance values, altering junctions depth, and isolating regions.

Abstract translation: 使用各种离子注入技术制造单片集成电路，用于制造二极管，晶体管，电阻器，电容器，地下通道连接，子集电极结等，并且用于改变杂质分布，金掺杂，修整电阻值，改变接合深度和隔离 地区。

公开(公告)号：US3767304A

公开(公告)日：1973-10-23

申请号：US3767304D

申请日：1972-07-03

Applicant: IBM

Inventor： KEENAN W ,  POPONIAK M ,  YEH T

IPC: H01L21/66 ,  G01N21/95 ,  G01R31/265 ,  G01N21/16 ,  G01N21/32

CPC classification number: G01N21/9505 ,  G01R31/2656

Abstract: An apparatus for detecting the presence of inclusions in semiconductor material having a polychromatic light source, a support for a semiconductor body, a light sensing means positioned to operate on light transmitted through the body from the light source, the sensing means including a substrate of the same type of semiconductor materials as the material of the semiconductor body, and having at least a PN junction in the substrate with means to backbias the junction, a means to indicate the relative amounts of light transmitted through the semiconductor body that is sensed by the sensing means. A method for detecting internal inclusion in a semiconductor body by directing through the body a beam of polychromatic light, sensing the light energy transmitted to the body with a light sensing element of the same type semiconductor material as the body being investigated.

Abstract translation: 一种用于检测具有多色光源的半导体材料中的夹杂物的存在的装置，用于半导体本体的支撑件，定位成对从光源透射通过本体的光进行操作的光感测装置，所述感测装置包括： 与半导体本体的材料相同类型的半导体材料，并且在衬底中具有至少一个PN结的装置，其具有用于反向连接的装置，用于指示透射通过半导体主体的光的相对量的装置，其通过感测感测 手段。