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公开(公告)号：DE69018806T2
公开(公告)日：1995-11-23
申请号：DE69018806
申请日：1990-12-13
Applicant: IBM
Inventor： MOK LAWRENCE S , SCHWALL ROBERT E , TONG HO-MING
IPC: H01L23/36 , H01L23/14 , H01L23/16 , H01L23/367 , H01L23/42
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公开(公告)号：DE69018806D1
公开(公告)日：1995-05-24
申请号：DE69018806
申请日：1990-12-13
Applicant: IBM
Inventor： MOK LAWRENCE S , SCHWALL ROBERT E , TONG HO-MING
IPC: H01L23/36 , H01L23/14 , H01L23/16 , H01L23/367 , H01L23/42
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