公开(公告)号：AT534139T

公开(公告)日：2011-12-15

申请号：AT09781028

申请日：2009-07-24

Applicant: IBM

Inventor： SCHWARZ KLAUS ,  MADAN ANITA ,  LIU XIAO ,  LAI CHUNG WOH ,  SCOTT JOHN

IPC: H01L21/268 ,  H01L21/322 ,  H01L29/10

Abstract: A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of the semiconductor body having a plurality of dislocations, the moveable laser being characterized as having a scan speed, the moveable laser manipulates the plurality of dislocations on the surface portion of the semiconductor body by adjusting the temperature and the scan speed of the laser beam.