公开(公告)号：DE1522119A1

公开(公告)日：1969-08-07

申请号：DE1522119

申请日：1966-12-14

Applicant: IBM

Inventor： EUGENE HARDING WILLIAM ,  ANTHONY PERRI JOHN ,  RISEMAN JACOB ,  SCOTT RUDER WINFIELD

IPC: G03B27/32 ,  G03B19/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G03B27/42

Abstract: 1,156,840. Multiple image cameras. INTERNATIONAL BUSINESS MACHINES CORP. Jan. 13, 1967 [Jan. 14, 1966], No. 2054/67. Heading G2A. A multiple image camera comprises means 40 for supporting a pattern 48 to be projected a photographic plate 60 and an array of image forming elements positioned in a movable member, there being means for causing moving and movable member in two perpendicular directions parallel to the plate 60. The pattern 48 may be divided in to four sections and each individually photographed or four different templates may be successively placed over a single pattern as each photograph is taken. In the first case, the lens array 20 is indexed so that the optical axes are centered in turn in each quadrant of the squares surrounding the circles 26. Indexing is effected by air cylinders (70X + ) 70X - , 70Y + , (70Y -1 ) Fig. 3A (not shown), and probes 100X + , 100X - , 100Y + , 100Y - are provided to check the correct positioning of the lens array before an exposure is made. The electric curcuit described for operating the apparatus is semi-automatic in operation, but may be fully automatic. After the four exposures have been made the single photograph is developed and the negative is employed as a mask for use in manufacturing semiconductor devices. The lens array is also adjustable in a direction perpendicular to the pattern 48.