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公开(公告)号：DE3466831D1
公开(公告)日：1987-11-19
申请号：DE3466831
申请日：1984-06-22
Applicant: IBM
Inventor： SIMPSON ROBERT A , TROTTER RALPH R , WEBER EDWARD V
IPC: H01L21/027 , H01J37/304 , H01L21/68 , H01L23/544 , H01L21/263 , G06F15/46 , H01J37/00
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