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公开(公告)号:DE3585437D1
公开(公告)日:1992-04-02
申请号:DE3585437
申请日:1985-12-13
Applicant: IBM
Inventor: GELORME JEFFREY DONALD , LAWRENCE WILLIAM HOWELL , SLOTA JR
Abstract: The surface of a substrate is roughened by providing a substrate which comprises a resinous material and an inorganic particulate material; and etching a surface of the substrate to selectively etch the resinous material and thereby produce the roughened surface. The preferred etching process is a dry etching process.