公开(公告)号：EP1402573A4

公开(公告)日：2010-09-15

申请号：EP02741827

申请日：2002-06-04

Applicant: IBM

Inventor： CAMPBELL JOHN E ,  DEVINE WILLIAM T ,  SRIKRISHAN KRIS V

IPC: H01L21/84 ,  H01L21/02 ,  H01L21/3205 ,  H01L21/336 ,  H01L21/76 ,  H01L21/762 ,  H01L21/8234 ,  H01L21/8238 ,  H01L21/8242 ,  H01L23/52 ,  H01L27/06 ,  H01L27/08 ,  H01L27/088 ,  H01L27/092 ,  H01L27/108 ,  H01L27/118 ,  H01L27/12 ,  H01L29/786

CPC classification number: H01L29/78648 ,  H01L21/743 ,  H01L21/76251 ,  H01L21/84 ,  H01L27/10832 ,  H01L27/10873 ,  H01L27/11803 ,  H01L27/1203 ,  H01L29/66772 ,  H01L29/78606 ,  H01L29/78612 ,  H01L2924/0002 ,  H01L2924/00