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    Method of fabrication of micro-optics device with curved surface defects
    1.
    发明专利
    Method of fabrication of micro-optics device with curved surface defects 未知

    公开(公告)号：GB2516183A

    公开(公告)日：2015-01-14

    申请号：GB201418276

    申请日：2013-03-05

    Applicant: IBM

    Inventor： DING FEI ,  DUERIG URS T ,  KNOLL ARMIN W ,  MAHRT RAINER F ,  STOEFERLE THILO HERMANN

    IPC: G02B5/28 ,  G03F7/00 ,  H01S5/183

    Abstract: A method of fabrication of a micro-optics device (1), the method comprising: -providing a layer (300) of material; -patterning said layer of material by locally unzipping and/or desorbing molecules therefore, with a nano-scale dimensione probe, to obtain a curved surface (s2) of layer of material, the curved surface having a curved profile (21, 21', 22) in at leas a plane section ((y, z), (x, z)); and -comprising a layer structure by providing one or more additional layers of material in contact with the curved surface, to obtain the micro-optics device (1), the latter having said layer structure, a given layer (10) therefore comprising a defect (20), said defect delimited by two surfaces, wherein one of said two surface is the curved surface (s2) and said at least one plane section ((y, z), (x, z)) is perpendicular to the layer structure.

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