-
公开(公告)号:JPH05205526A
公开(公告)日:1993-08-13
申请号:JP20784592
申请日:1992-08-04
Applicant: IBM
Inventor: JIEIMUZU RAPUTON HEDORITSUKU , DONARUDO KURIFUOODO HOUFUAA , JIEFURII UIRIAMU RABADEII , ROBAATO BURUUSU PURAIMU , TOMASU POORU RATSUSERU
Abstract: PURPOSE: To provide a foaming polymer which is used as a dielectric material and whose hole diameter is smaller than 1000 Å, and a manufacturing method therefor. CONSTITUTION: This foaming polymer is manufactured by the following process; (a) to generate a copolymer of a matrix polymer and a thermally decomposable polymer thermally decomposed at a temperature lower a decomposing temperature of the matrix polymer and (b) to generate a foaming polymer by heating the colpolymer to a decomposing temperature of the thermally decomposable polymer or a temperature not less than it and a temperature lower than a decomposing temperature of the matrix polymer.