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公开(公告)号:DE3675967D1
公开(公告)日:1991-01-17
申请号:DE3675967
申请日:1986-04-04
Applicant: IBM
Inventor: HENNING TIMOTHY PAUL , TOPA ROBERT DAVID
IPC: C25D3/56
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公开(公告)号:DE69003333T2
公开(公告)日:1994-04-21
申请号:DE69003333
申请日:1990-07-07
Applicant: IBM
Inventor: KANG SUNG KWON , PALMER MICHEAL JON , REILEY TIMOTHY CLARK , TOPA ROBERT DAVID
IPC: B23K20/02 , B23K20/233 , B23K33/00 , H01L21/60 , H01L21/603 , H01L21/00
Abstract: A contact member for thermocompression bonding in integrated circuit packaging has on a conductor end a uniform texture deformable layer with a hardness value in the range of that of soft gold which is approximately 90 on the Knoop scale and with a rough surface morphology having ridges with approximately 1 micrometer modulation frequency and a depth between ridges of from 1/4 to 1/2 that of the average integrated circuit pad. The deformable layer is produced by plating gold in a strong electronegative plating bath within a range of 0.03 to 0.05 mA/sq.cm. current density. Plating apparatus, for plating different areas, with different electronegative conditions, with separate independently powered anodes, is provided.
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公开(公告)号:DE69003333D1
公开(公告)日:1993-10-21
申请号:DE69003333
申请日:1990-07-07
Applicant: IBM
Inventor: KANG SUNG KWON , PALMER MICHEAL JON , REILEY TIMOTHY CLARK , TOPA ROBERT DAVID
IPC: B23K20/02 , B23K20/233 , B23K33/00 , H01L21/60 , H01L21/603 , H01L21/00
Abstract: A contact member for thermocompression bonding in integrated circuit packaging has on a conductor end a uniform texture deformable layer with a hardness value in the range of that of soft gold which is approximately 90 on the Knoop scale and with a rough surface morphology having ridges with approximately 1 micrometer modulation frequency and a depth between ridges of from 1/4 to 1/2 that of the average integrated circuit pad. The deformable layer is produced by plating gold in a strong electronegative plating bath within a range of 0.03 to 0.05 mA/sq.cm. current density. Plating apparatus, for plating different areas, with different electronegative conditions, with separate independently powered anodes, is provided.
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