Abstract:
Structures and methods are provided for temporarily bonding handler wafers to device wafers using bonding structures that include one or more releasable layers which are laser-ablatable using mid-wavelength infrared radiation
Abstract:
PROBLEM TO BE SOLVED: To provide a Si-based packaging with integrated passive components for millimeter wave applications. SOLUTION: An apparatus is described incorporating an interposer 1 having a cavity for a portion of an antenna structure 22, having conductor through vias 3, a top Si part 6 having interconnection wiring 72, 73, 74 and having pads for electrically mounting an integrated circuit chip 21 thereon, wherein the top Si part mates with the interposer electrically and mechanically. The interposer and the top Si part may be scaled to provide an array of functional units. This invention overcomes the problem of combining a high efficient antenna with integrated circuit chips in a Si package with signal frequencies from 1 to 100 GHz and the problem of shielding components proximate to the antenna and reduces strain arising from mismatching of TCEs. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
Structures and methods are provided for temporarily bonding handler wafers to device wafers using bonding structures that include one or more releasable layers which are laser-ablatable using mid-wavelength infrared radiation