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公开(公告)号:SG43687A1
公开(公告)日:1997-11-14
申请号:SG1995002164
申请日:1993-12-07
Applicant: IBM
Abstract: The present invention relates to a process for coating a magnetic recording device with a lubricating polymeric film using an ion beam source. The process comprises the steps of: (i) placing the article in a chamber; (ii) evacuating the chamber; (iii) providing a beam of ions of one sign; (iv) introducing precursor gas into the chamber; and (v) contacting the surface of the article with the beam and the precursor gas to form the polymeric film on the surface of the article.