6.
    发明专利
    未知

    公开(公告)号:DE68914939T2

    公开(公告)日:1994-11-10

    申请号:DE68914939

    申请日:1989-09-21

    Applicant: IBM

    Abstract: Thin-film electrical circuits are interconnected by a process comprising the steps of partially ablating the existing thin-film conductor at the connection point(s) by means of a pulsed laser and then depositing a thin-film metal interconnection over the desired area, which includes the area(s) of the existing thin-film circuit that were exposed to the pulsed laser.

    7.
    发明专利
    未知

    公开(公告)号:DE68914939D1

    公开(公告)日:1994-06-01

    申请号:DE68914939

    申请日:1989-09-21

    Applicant: IBM

    Abstract: Thin-film electrical circuits are interconnected by a process comprising the steps of partially ablating the existing thin-film conductor at the connection point(s) by means of a pulsed laser and then depositing a thin-film metal interconnection over the desired area, which includes the area(s) of the existing thin-film circuit that were exposed to the pulsed laser.

    8.
    发明专利
    未知

    公开(公告)号:DE3585018D1

    公开(公告)日:1992-02-06

    申请号:DE3585018

    申请日:1985-10-17

    Applicant: IBM

    Abstract: An improved technique is described for the formation of conducting patterns on substrates. This technique has particular utility in the provision of "seeding" layers which are often used as catalysis for electroless deposition of an overlying metal layer. The seed layer is provided by casting a polymer containing a seed constituent onto a substrate, after which the polymer is ablatively photodecomposed by far UV radiation of wavelengths less than 400 nm and sufficient energy fluence to create ablative photodecomposition. This exposes the seed constituent in the polymer in the irradiated areas. Electroless plating of a metal can then occur, the plating being limited to only those areas which have been selectively exposed by the laser irradiation. Thus, a seed layer is prepared by dry processing, in contrast with previous techniques using plating solutions to provide the seed layer.

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