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公开(公告)号：JPS62274737A
公开(公告)日：1987-11-28
申请号：JP9108687
申请日：1987-04-15
Applicant: IBM
Inventor： ROBAATO JIYOSEFU KUREMENTEI , CHIYAARUZU EDOWAADO GAZUDEITSU , UIRIAMU REIFUAA , ROI RUISU RABUSUKII , DONARUDO JIIN MAKUBURAIDO , JIYOORU BUAAN MANSON , YUUJIN PIITAA SUKAABUINKO
IPC: H01L21/60 , H01L21/48 , H01L23/498 , H01L23/538 , H05K1/00 , H05K3/00 , H05K3/38
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