公开(公告)号：AT31087T

公开(公告)日：1987-12-15

申请号：AT84105749

申请日：1984-05-21

Applicant: IBM

Inventor： GELCHINSKI MORDECHAI HIRSH ,  ROMANKIW LUBOMYR TARAS ,  VIGLIOTTI DONALD RICHARD ,  VON GUTFELD ROBERT JACOB

IPC: H01L21/306 ,  C23C18/16 ,  C23F1/00 ,  C23F1/02 ,  C25D5/02 ,  C25D5/08 ,  C25F3/14 ,  H05K3/06 ,  H05K3/24

Abstract: An intense laser beam is focused at a jet nozzle through which an electrolyte is directed towards a substrate, so that the laser beam travels with the jet to the substrate. The laser beam heats the site of the substrate on which it falls, and thereby enhances the etching or plating process being carried out in the substrate.

公开(公告)号：DE3467779D1

公开(公告)日：1988-01-07

申请号：DE3467779

申请日：1984-05-21

Applicant: IBM

Inventor： GELCHINSKI MORDECHAI HIRSH ,  ROMANKIW LUBOMYR TARAS ,  VIGLIOTTI DONALD RICHARD ,  VON GUTFELD ROBERT JACOB

IPC: H01L21/306 ,  C23C18/16 ,  C23F1/00 ,  C23F1/02 ,  C25D5/02 ,  C25D5/08 ,  C25F3/14 ,  H05K3/06 ,  H05K3/24

Abstract: An intense laser beam is focused at a jet nozzle through which an electrolyte is directed towards a substrate, so that the laser beam travels with the jet to the substrate. The laser beam heats the site of the substrate on which it falls, and thereby enhances the etching or plating process being carried out in the substrate.