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公开(公告)号：DE2356975A1
公开(公告)日：1974-07-11
申请号：DE2356975
申请日：1973-11-15
Applicant: IBM
Inventor： LEHMAN HERBERT SAUL , PLISKIN WILLIAM AARON , VROMEN BENJAMIN HERBERT
IPC: H01L29/78 , H01L21/316 , H01L29/00 , H01L11/14
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