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公开(公告)号：SG98375A1
公开(公告)日：2003-09-19
申请号：SG200002004
申请日：2000-04-07
Applicant: IBM
Inventor： DIANE C BOYD , RICHARD WISE , WILLIAM C WILLIE , WALDERMAR W KOCON , STUART M BURNS , HUSSEIN I HANAFI
IPC: H01L29/417 , H01L21/302 , H01L21/3065 , H01L21/311 , H01L21/336 , H01L21/762 , H01L21/8234 , H01L21/8242 , H01L27/108 , H01L29/78 , B08B7/00 , H01L21/00
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