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公开(公告)号：DE69003728T2
公开(公告)日：1994-05-05
申请号：DE69003728
申请日：1990-03-20
Applicant: IBM
Inventor： JAGANNATHAN RANGARAJAN , KNARR RANDOLPH FREDERICK , KRISHNAN MAHADEVAIYER , WANDY GREGORY PETER
IPC: C23C18/40
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公开(公告)号：DE69003728D1
公开(公告)日：1993-11-11
申请号：DE69003728
申请日：1990-03-20
Applicant: IBM
Inventor： JAGANNATHAN RANGARAJAN , KNARR RANDOLPH FREDERICK , KRISHNAN MAHADEVAIYER , WANDY GREGORY PETER
IPC: C23C18/40
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