公开(公告)号：DE2357232A1

公开(公告)日：1974-06-20

申请号：DE2357232

申请日：1973-11-16

Applicant: IBM

Inventor： HERITAGE MARCUS BARRY ,  WARDLY GEORGE ALFRED

IPC: H01J37/04 ,  H01J37/147 ,  H01J37/304 ,  H01J37/305 ,  H01L21/027 ,  H01J37/24 ,  H01L7/64

Abstract: The present invention relates to circuit means for use in combination with an electron beam projection system of the type wherein an image is projected onto a wafer by means of a scanning electron beam. The circuit means is employed to provide a regulated scan rate. In the system either the secondary electron current from the wafer or the wafer current itself is used to drive a pre-amplifier, the output of which is sent to a pair of attenuator networks to provide scan control. The outputs of the attenuators are fed to a pair of integrating amplifiers, the outputs of which are used to drive a pair of deflection amplifiers after passing through a pair of scan limit detectors and flyback circuits. The outputs of the deflection amplifiers are used to drive the X and Y deflection coils located before the final condenser lens.

公开(公告)号：DE2255507A1

公开(公告)日：1973-05-30

申请号：DE2255507

申请日：1972-11-13

Applicant: IBM

Inventor： WARDLY GEORGE ALFRED

IPC: H01J29/70 ,  H01J29/76 ,  H01J37/14 ,  H01J37/147 ,  H01J37/153