Patent search ap:("IBM") AND inv:"WASKIEWICZ CHRISTOPHER JOSEPH" Page 1

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发明专利
Process for the elimination of tungsten oxidation with inert gas stabilization in chemical vapor deposition processes 未知

公开(公告)号：SG78275A1

公开(公告)日：2001-02-20

申请号：SG1997002971

申请日：1997-08-19

Applicant: IBM

Inventor： COTE DONNA RIZZONE , COTE WILLIAM JOSEPH , MIURA DONNA DIANE , WASKIEWICZ CHRISTOPHER JOSEPH

IPC: C23C16/30 , C23C16/44

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