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公开(公告)号：DE3378145D1
公开(公告)日：1988-11-03
申请号：DE3378145
申请日：1983-10-26
Applicant: IBM
Inventor： CUOMO JEROME JOHN , HARPER JAMES MCKELL EDWIN , WATERS GARY ALEXANDER
IPC: C23F4/00 , C23C14/46 , H01J27/02 , H01J27/08 , H01J37/08 , H01J37/305 , H01J37/317 , H01L21/265 , H01L21/302
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