公开(公告)号：DE68909779T2

公开(公告)日：1994-05-05

申请号：DE68909779

申请日：1989-06-16

Applicant: IBM

Inventor： BUCHMANN PETER LEO DR ,  VETTIGER PETER ,  VOEGELI OTTO DR ,  WEBB DAVID JOHN DR

IPC: H01L21/302 ,  G02B6/122 ,  H01L21/3065 ,  H01L27/15 ,  H01S5/00 ,  H01S5/02 ,  H01S5/028 ,  H01S5/16 ,  H01S5/22 ,  H01S3/025 ,  H01S3/085 ,  H01S3/19 ,  G02B6/12

Abstract: A method, and devices produced therewith, for improving the flatness of etched mirror facets (18) of integrated optic structures with non-planar stripe waveguides (17) such as ridge or groove diode lasers or passive devices like modulators and switches. The curvature in the mirror facet surface, occurring at the edges of the waveguide due to topographical, lithographical and etch process effects, that causes detrimental phase distortions, is avoided by widening the waveguide end (23) near the mirror surface (18) thereby shifting the curved facet regions away from the light mode region (24) to surface regions (29) where curvature is not critical.

公开(公告)号：DE68909779D1

公开(公告)日：1993-11-11

申请号：DE68909779

申请日：1989-06-16

Applicant: IBM

Inventor： BUCHMANN PETER LEO DR ,  VETTIGER PETER ,  VOEGELI OTTO DR ,  WEBB DAVID JOHN DR

IPC: H01L21/302 ,  G02B6/122 ,  H01L21/3065 ,  H01L27/15 ,  H01S5/00 ,  H01S5/02 ,  H01S5/028 ,  H01S5/16 ,  H01S5/22 ,  H01S3/025 ,  H01S3/085 ,  H01S3/19 ,  G02B6/12

Abstract: A method, and devices produced therewith, for improving the flatness of etched mirror facets (18) of integrated optic structures with non-planar stripe waveguides (17) such as ridge or groove diode lasers or passive devices like modulators and switches. The curvature in the mirror facet surface, occurring at the edges of the waveguide due to topographical, lithographical and etch process effects, that causes detrimental phase distortions, is avoided by widening the waveguide end (23) near the mirror surface (18) thereby shifting the curved facet regions away from the light mode region (24) to surface regions (29) where curvature is not critical.