公开(公告)号：GB2365808A

公开(公告)日：2002-02-27

申请号：GB0115775

申请日：2001-06-28

Applicant: IBM

Inventor： LI LEPING ,  BARBEE STEVEN GEORGE ,  LEE ERIC JAMES ,  MARTIN FRANCISCO A ,  WEI CONG

IPC: H01L21/302 ,  B24B37/04 ,  B24B49/12 ,  G11B5/31 ,  H01L21/304 ,  B24B49/00

Abstract: An endpoint indicating film 31 is provided between a metal oxide layer 22 overlying a substrate. During chemical mechanical polishing, the endpoint of the process is determined by extracting gaseous reaction product from the slurry (14, fig. 5) arising from a chemical reaction between the slurry (14, fig. 5) and the indicating film 31 and generating a signal in accordance with the concentration of the extracted reaction product, wherein a change in the signal indicates the endpoint. The extracted reaction product may be converted into a different product which emits chemiluminescence which is detected to provide the signal. The metal oxide layer 22 is preferably aluminium oxide, the endpoint indicating film 31 is preferably aluminium nitride and the reaction product ammonia. The method can be used to form a cloisonn’ structure.