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公开(公告)号：DE3267927D1
公开(公告)日：1986-01-23
申请号：DE3267927
申请日：1982-09-08
Applicant: IBM
Inventor： BERGENDAHL ALBERT STEPHEN , HAKEY MARK CHARLES , WILSON JOHN PAUL
IPC: G03F7/26 , G03F7/095 , G03F7/20 , H01L21/027 , H01L21/312 , H01L21/47
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