公开(公告)号：US3707944A

公开(公告)日：1973-01-02

申请号：US3707944D

申请日：1970-10-23

Applicant: IBM

Inventor： GRUNDON F ,  MASTERSON F ,  WAGLER R ,  WUSTRAU F

IPC: B05C11/06 ,  G03F7/16 ,  H01L21/00 ,  C23C13/10

CPC classification number: H01L21/6715 ,  B05C11/06 ,  G03F7/162

Abstract: Apparatus for automatically positioning articles, as silicon semiconductor wafers, on rotary spin assembly mechanisms and indexing transporting means and a means for holding said wafer thereon combined with a means for dispensing a predetermined amount of photoresist solution on said wafers and spinning a uniform film of solution on the wafers and spin air drying through a sequence of rotating indexing steps followed by automatic transfer to and through drying means and a means for unloading therefrom and transporting the wafers to a receiver holder for further processing and transportation.

Abstract translation: 用于将物品（作为硅半导体晶片）自动定位在旋转旋转组装机构和分度传送装置上的装置以及用于将其上的晶片保持在其上的装置与用于在所述晶片上分配预定量的光致抗蚀剂溶液的装置并纺出均匀的溶液膜 通过一系列旋转分度步骤干燥，然后自动转移到干燥装置和通过干燥装置和用于从其中卸载并将晶片运送到接收器支架进行进一步处理和运输的装置。

公开(公告)号：CA936627A

公开(公告)日：1973-11-06

申请号：CA107422

申请日：1971-03-11

Applicant: IBM

Inventor： CACHON R ,  WUSTRAU F ,  GRUNDON F ,  MASTERSON F ,  MILLER J

IPC: G03F7/20 ,  H01L21/68