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公开(公告)号:JPH08241963A
公开(公告)日:1996-09-17
申请号:JP2267895
申请日:1995-02-10
Applicant: IBM
Inventor: MIYATAKE HISATADA , SUNANAGA TOSHIO , KITAMURA TSUNEJI , YAMAMOTO MASAAKI
IPC: G11C11/401 , G11C5/14 , H01L21/8242 , H01L27/108
Abstract: PURPOSE: To provide a reliable high-density semiconductor integrated circuit device with high-speed operation by forming a DRAM macrocell and a logical cell in a common chip. CONSTITUTION: A DRAM macroscopic cell 14 is formed on the same cell as a logical cell. The DRAM macroscopic cell 14 includes a guard ring 26 of a conductive type opposite to that of a semiconductor substrate, a memory cell alley 42 formed in a well in the guard ring 26, a power line 34, a grounding line 36, and a bypass capacitor 70 joined between the power line 34 and the grounding line 36. The power line 36 and a logical-cell power line are connected to different power pads, while the grounding line 36 and a logic-cell grounding line are connected to a common grounding line or to grounding lines provided near to each other and connected with a low impedance line.