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公开(公告)号:DE2232274A1
公开(公告)日:1974-01-31
申请号:DE2232274
申请日:1972-06-30
Applicant: IBM DEUTSCHLAND
Inventor: BAITINGER UTZ DIPL ING DR , FRANTZ HERMANN , HAUG WERNER DIPL ING , ILLI MANFRED DIPL ING DR , KELLER GUENTER DIPL ING
IPC: G11C11/412 , G05F3/24 , G11C11/407 , G11C11/417 , H01L21/8234 , H01L27/02 , H01L27/088 , H01L1/24