公开(公告)号：SG10201405032UA

公开(公告)日：2014-10-30

申请号：SG10201405032U

申请日：2010-10-26

Applicant: ILLINOIS TOOL WORKS

Inventor： GEFTER PETER ,  KLOCHKOV ALEKSEY ,  MENEAR JOHN E

IPC: H01J3/14 ,  B01D59/44 ,  G01N23/00 ,  G01N27/62 ,  H01J49/22 ,  H01J49/26

Abstract: Ion delivery manifolds with a gas transport channel, for receiving an ionized gas stream, and plural outlets that divide the gas stream into plural neutralization gas streams that are directed toward respective plural target regions are disclosed. At least generally equal ion distribution across the target regions is achieved by using different ion flow rates through the plural outlets. Methods of delivering plural neutralization streams to respective plural target regions include steps for receiving an ionized gas stream, for dividing the ionized gas stream into plural neutralization streams, and for directing the neutralization streams toward respective target regions. At least generally equal ion distribution across the target regions is achieved by differing the ion flow rates of the neutralization streams.

公开(公告)号：EP2494573A4

公开(公告)日：2017-12-06

申请号：EP10827371

申请日：2010-10-26

Applicant: ILLINOIS TOOL WORKS

Inventor： GEFTER PETER ,  KLOCHKOV ALEKSEY ,  MENEAR JOHN E

IPC: H01J3/14 ,  B03C3/36 ,  B03C3/38

CPC classification number: H01J27/024 ,  B03C3/361 ,  B03C3/38

Abstract: Ion delivery manifolds with a gas transport channel, for receiving an ionized gas stream, and plural outlets that divide the gas stream into plural neutralization gas streams that are directed toward respective plural target regions are disclosed. At least generally equal ion distribution across the target regions is achieved by using different ion flow rates through the plural outlets. Methods of delivering plural neutralization streams to respective plural target regions include steps for receiving an ionized gas stream, for dividing the ionized gas stream into plural neutralization streams, and for directing the neutralization streams toward respective target regions. At least generally equal ion distribution across the target regions is achieved by differing the ion flow rates of the neutralization streams.

公开(公告)号：EP2422219A4

公开(公告)日：2017-11-15

申请号：EP10767438

申请日：2010-04-23

Applicant: ILLINOIS TOOL WORKS

Inventor： GEFTER PETER ,  KLOCHKOV ALEKSEY ,  MENEAR JOHN E ,  NELSEN LYLE DWIGHT

IPC: G01T1/185

CPC classification number: B03C3/017 ,  B03C3/155 ,  B03C3/383 ,  B03C3/41 ,  B03C3/49 ,  B03C2201/06 ,  B03C2201/24

Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.