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    Manufacture of capacity-type thin-film humidity sensor
    1.
    发明专利
    Manufacture of capacity-type thin-film humidity sensor 失效
    容量型薄膜湿度传感器的制造

    公开(公告)号：JPS59168354A

    公开(公告)日：1984-09-22

    申请号：JP4230783

    申请日：1983-03-16

    Applicant: Asaga Akio ,  Imai Yoshio

    Inventor： NABETA YOUICHI ,  SUZUKI KAZUHIRO ,  INUZUKA TADAO

    IPC: G01N27/22 ,  H01G7/00

    CPC classification number: G01N27/225

    Abstract: PURPOSE:To enable a metallic compound film of capacity-type thin-film humidity sensor to effect measurements with high responsivity, regeneration property and measuring accuracy even under unfavorable conditions of high temperature and solvent- saturated atmosphere, etc., by providing said thin-film with humidity-sensitive property with purpose-conscious change of Ar to O2 ratio and forming by ion-plating process. CONSTITUTION:After installing bottom electrodes 12, 12 in an opposed manner on a non-dielectric substrate 10, such as glass, etc., a high-frequency power is applied by a HF power source 30 between an ionizing electrode 24 and an electrode holding a substrate 10, for example, Al vapor generated from a vaporating source 26 by heating by percussion metalic piece, such as Al, etc. with electron-beams is allowed be introduced towards the substrate 10 from a shield 36 propided with an opening 34. A gas mixture of Ar and O2 with a range of constant ratios Ar:O2=0:10-1:1 is conducted into a vacuum chamber 20 through a valve 40 and Al2O2 film 14 is formed covering the electrodes 11, 12 at 10 -10 Tol. Then, a top electrode 18 is formed on a film 14. Next, a lead wire is connected. Thus, a humidity sensor of high measuring accuracy, pronounced mechanical strengths also can be obtained, even under high-temperature, high- humidity and organic solvent saturated atmosphere.

    Abstract translation: 目的：为了使容量型薄膜湿度传感器的金属化合物膜即使在高温和溶剂饱和气氛等的不利条件下也能够高响应性，再生性能和测量精度进行测量， 具有湿度敏感性的膜，具有目的意识的Ar与O 2比变化并通过离子电镀工艺形成。 构成：在非电介质基板10（例如玻璃等）上以相对的方式安装底部电极12,12之后，HF电源30在电离电极24和电极保持电极之间施加高频电力 允许通过用电子束通过诸如Al等的冲击金属片加热而从蒸发源26产生的Al蒸气的衬底10被从具有开口34的屏蔽36引导到衬底10。 通过阀40将具有一定比例的Ar：O 2 = 0：10-1：1的Ar和O2的气体混合物导入真空室20中，并且在10℃下形成覆盖电极11,12的Al 2 O 2膜14， -3> -10 <-4> Tol 然后，在薄膜14上形成顶部电极18.接着，连接导线。 因此，即使在高温，高湿度和有机溶剂饱和气氛下，也可以获得高测量精度的湿度传感器，显着的机械强度。

    CAPACITY TYPE THIN FILM HUMIDITY SENSOR AND ITS PREPARATION
    3.
    发明专利
    CAPACITY TYPE THIN FILM HUMIDITY SENSOR AND ITS PREPARATION 失效

    公开(公告)号：JPS60171443A

    公开(公告)日：1985-09-04

    申请号：JP2695884

    申请日：1984-02-17

    Applicant: IMAI YOSHIO ,  ASAGA AKIO

    Inventor： NABETA YOUICHI ,  INUZUKA TADAO

    IPC: G01N27/22

    Abstract: PURPOSE:To make it possible to selectively control humidity-sensitive characteristics, by providing a humidity sensor, which is formed by layering a lower electrode, a thin film comprising a metal compound active to humidity and an upper electrode, on a non-conductive substrate of which the surface is roughened in a specific range. CONSTITUTION:The surface of a non-conductive substrate 10 such as a glass substrate is manually ground for about 5-10min by an abrasive such as alumina particles to form a roughened surface 13 having a roughness degree of about 0.7-1.3mum in a particle dimension and a pair of lower electrodes 12, 12, which are not contacted but meshed to each other, are formed to the surface of the substrate 10 in a comb shape. In the next step, an evaporation source 26 is heated in a vacuum chamber 20 to form an aluminum ion and a metal compound membrance 14 comprising an alumina film is formed onto the substrate 10 and the lower electrodes 12 under the reaction with a gaseous mixture and, thereafter, a humidity pervious metal upper electrode 18 such as a gold film is vapor deposited on the membrane 14. By this method, sensitivity can be enhanced in a range good in linearity.

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