公开(公告)号：EP2362199A1

公开(公告)日：2011-08-31

申请号：EP10166586.7

申请日：2010-06-18

Applicant: IMEC

Inventor： Rottenberg, Xavier ,  Jansen, Roelof ,  Tilmans, Hendrikus

IPC: G01K7/32 ,  H03H9/02

CPC classification number: G01K7/32 ,  H03H3/0076 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/02377 ,  H03H2009/02299 ,  H03H2009/02496

Abstract: The invention relates to a micromechanical resonator device and a method for measuring a temperature. The device comprising a resonator body, an excitation module associated with the resonator body, a control module and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence.

Abstract translation: 本发明涉及一种微机械谐振器装置和一种用于测量温度的方法。 该装置包括谐振器体，与谐振器本体相关联的激励模块，控制模块和频率检测模块。 谐振器体适于以至少第一和第二预定谐振状态分别谐振，通过施加不同的偏置来选择，状态具有相同本征模，但是具有不同的谐振频率，每个谐振频率具有不同的温度依赖性。

公开(公告)号：EP4198586A1

公开(公告)日：2023-06-21

申请号：EP21216136.8

申请日：2021-12-20

Applicant: IMEC VZW

Inventor： Figeys, Bruno ,  Kjellman, Jon ,  Jansen, Roelof

IPC: G02B6/12 ,  G02F1/29 ,  G01S7/481 ,  G02B6/26 ,  G02B27/00 ,  G02B6/122 ,  G02B6/30

Abstract: An integrated optical structure (1) for phase front engineering of optical beams (2) comprising:
- a substrate (100);
- a plurality of optical layers (201;202) formed on said substrate (100) and comprising:
o an optical phased array (21;22) comprising a plurality of optical waveguides (220); and
o a coupling section (20) for each of said optical waveguides (220) configured to control the phase of an optical beam (2) coupling out of said optical waveguide (220); and

- a slab waveguide (300) formed between two of said optical layers (201;202) and in optical communication with said coupling sections (20) of said two optical layers (201;202); and wherein said slab waveguide (300) comprises a slab waveguide outcoupling structure (301) configured for transmission of optical beams (2) out of and/or for reception of optical beams (2) into the plane (7) of said substrate (100).

公开(公告)号：EP2479891A1

公开(公告)日：2012-07-25

申请号：EP11168324.9

申请日：2011-05-31

Applicant: IMEC

Inventor： Rottenberg, Xavier ,  Jansen, Roelof ,  Stoffels, Steve ,  Tilmans, Hendrikus

IPC: H03H9/02

CPC classification number: H03H9/02338 ,  H03H2009/0244 ,  H03H2009/02496

Abstract: MEMS resonator comprising: a substrate; a resonator body (1) suspended above the substrate by means of clamped-clamped beams (4), each beam comprising two support legs (41, 42) with a common connection (5) to the resonator body, the resonator body (1) being adapted for resonating at an operating frequency (fres); excitation means (6, 7) for exciting the resonator body into a vibration at the operating frequency (fres). Each beam is adapted for oscillating in a flexural mode at a given flexural wavelength as a result of said vibration of said resonator body at said operating frequency (fres). Each leg is acoustically long with respect to said flexural wavelength of the beam.

Abstract translation: MEMS谐振器，包括：基板; 谐振器体（1），其通过夹紧的梁（4）悬挂在基板上方，每个梁包括具有与谐振器主体的共同连接（5）的两个支撑腿（41,42），谐振器主体（1） 适于以工作频率（fres）谐振; 激励装置（6,7），用于将谐振器体激发成工作频率（fres）的振动。 作为所述谐振器本体在所述工作频率（fres）下的所述振动的结果，每个光束适于以给定弯曲波长的弯曲模式振荡。 相对于梁的所述弯曲波长，每条腿在声学上是长的。

公开(公告)号：EP4113179A1

公开(公告)日：2023-01-04

申请号：EP21183522.8

申请日：2021-07-02

Applicant: Imec VZW ,  Universiteit Gent

Inventor： Bogaerts, Wim ,  Westerveld, Wouter Jan ,  Jansen, Roelof

IPC: G02B6/12

Abstract: An integrated photonic device (100) for wavelength division multiplexing comprises: a wavelength-splitting/combining component (110; 310; 510) having a first side and a second side, and configured to be re-used for both splitting a single signal to be split, wherein the signal to be split comprises plural wavelengths, to plural split signals, wherein each of the plural split signals is related to a unique wavelength band, and combining plural signals to be combined, wherein each of the plural signals to be combined is related to a unique wavelength band, to a single combined signal, wherein the wavelength-splitting/combining component (110; 310; 510) comprises at least one output channel for providing an output signal and at least one response channel for receiving a response input signal from a light interaction induced by the output signal, wherein the output channel and the response channel are connected to different ports of the wavelength-splitting/combining component, and wherein the component comprises at least one additional channel on either the first side or the second side, which additional channel is dedicated to be used only in splitting the single signal to be split or in combining the plural signals to be combined, and wherein the component comprises at least one additional channel on either the first side or the second side, which additional channel is dedicated to be used only in splitting the single signal to be split or in combining the plural signals to be combined.