公开(公告)号：US20200350200A1

公开(公告)日：2020-11-05

申请号：US16957090

申请日：2018-12-19

Applicant: IMEC VZW

Inventor： Aurelie HUMBERT ,  Simone SEVERI

IPC: H01L21/762 ,  G01N27/414

Abstract: According to an aspect of the present inventive concept there is provided a method for manufacturing a fluid sensor device comprising: bonding a silicon-on-insulator arrangement comprising a silicon wafer, a buried oxide, a silicon layer, and a first dielectric layer, to a CMOS arrangement comprising a metallization layer and a planarized dielectric layer, wherein the bonding is performed via the first dielectric layer and the planarized dielectric layer; forming a fin-FET arrangement in the silicon layer, wherein the fin-FET arrangement is configured to function as a fluid sensitive fin-FET arrangement; removing the buried oxide and the silicon wafer; forming a contact to the metallization layer and the fin-FET arrangement, wherein the contact comprises an interconnecting structure configured to interconnect the metallization layer and the fin-FET arrangement; forming a channel comprising an inlet and an outlet, wherein the channel is configured to allow a fluid comprising an analyte to contact the fin-FET arrangement.

公开(公告)号：US20200174186A1

公开(公告)日：2020-06-04

申请号：US16703242

申请日：2019-12-04

Applicant: IMEC VZW ,  KATHOLIEKE UNIVERSITEIT LEUVEN

Inventor： Wouter Jan WESTERVELD ,  Veronique ROCHUS ,  Simone SEVERI ,  Roelof JANSEN

IPC: G02B6/122 ,  G01D5/353

Abstract: A waveguide for guiding an electro-magnetic wave comprises: a first waveguide part; and a second waveguide part; wherein the first waveguide part has a first width in a first direction (Y) perpendicular to the direction of propagation of the electro-magnetic wave and the second waveguide part has a second width in the first direction (Y), wherein the second width is larger than the first width; and wherein the first and the second waveguide parts are spaced apart by a gap in a second direction (Z) perpendicular to the first and second planes in which the waveguide parts are formed, wherein the gap has a size which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide for guiding the electro-magnetic wave.A photonic integrated circuit component, a sensor and an actuator comprising the waveguide are disclosed.

公开(公告)号：US20240207845A1

公开(公告)日：2024-06-27

申请号：US18389977

申请日：2023-12-20

Applicant: IMEC VZW

Inventor： Lei ZHANG ,  Simone SEVERI ,  Riet LABIE ,  Philippe SOUSSAN ,  Tim STAKENBORG ,  Gauri KARVE

IPC: B01L3/00 ,  B81B7/00 ,  B81C1/00

CPC classification number: B01L3/502715 ,  B81B7/008 ,  B81C1/00238 ,  B01L2200/04 ,  B01L2300/0645 ,  B01L2300/168 ,  B81B2201/05 ,  B81B2203/0338 ,  B81B2207/07 ,  B81C2203/0792

Abstract: According to an aspect of the present inventive concept there is provided a microfluidic device comprising: at least one structure arranged in a pocket-defining layer defining a pocket in the pocket-defining layer; a semiconductor chip arranged in the pocket, the semiconductor chip comprising at least one electrode at the surface of the semiconductor chip; an electrical connection layer arranged above the semiconductor chip, wherein the electrical connection layer comprises electronic connections electrically connected to the at least one electrode and arranged to extend laterally in the electrical connection layer away from the semiconductor chip; at least one fluidic channel extending through the pocket-defining layer and above the semiconductor chip, the fluidic channel being arranged to be in fluidic communication with the at least one electrode.

公开(公告)号：US20200173843A1

公开(公告)日：2020-06-04

申请号：US16703657

申请日：2019-12-04

Applicant: IMEC VZW ,  KATHOLIEKE UNIVERSITEIT LEUVEN

Inventor： Wouter Jan WESTERVELD ,  Veronique ROCHUS ,  Simone SEVERI ,  Roelof JANSEN

IPC: G01H9/00 ,  G02B6/42

Abstract: A sensor comprises: a thin structure, which is configured to receive a force for deforming a shape of the thin structure and which is arranged above a substrate; and a waveguide for guiding an electro-magnetic wave comprising: a first waveguide part; and a second waveguide part; wherein the second waveguide part has a larger width than the first waveguide part; and wherein the first and the second waveguide parts are spaced apart by a gap which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide, wherein one of the first and the second waveguide part is arranged at least partly on the thin structure and another of the first and the second waveguide part is arranged on the substrate.

公开(公告)号：US20200174192A1

公开(公告)日：2020-06-04

申请号：US16703650

申请日：2019-12-04

Applicant: IMEC VZW ,  KATHOLIEKE UNIVERSITEIT LEUVEN

Inventor： Md Mahmud Ul HASAN ,  Simone SEVERI ,  Veronique ROCHUS ,  Wouter Jan WESTERVELD

IPC: G02B6/132 ,  G02B6/136 ,  C23C16/455 ,  C23C16/56

Abstract: A method for manufacturing of a waveguide for guiding an electro-magnetic wave comprising: forming a first waveguide layer, a sacrificial layer and a protection layer on a first wafer, patterning to define a pattern of a first waveguide part and a supporting structure in the first waveguide layer; exposing the sacrificial layer on the first waveguide part while the protection layer still covers the sacrificial layer on the supporting structure; removing the sacrificial layer on the first waveguide part; removing the protection layer; bonding a second wafer to the sacrificial layer of the first wafer such that a second waveguide part is supported by the supporting structure and a gap corresponding to the thickness of the sacrificial layer is formed between the first and second waveguide parts.

公开(公告)号：US20170145498A1

公开(公告)日：2017-05-25

申请号：US15337711

申请日：2016-10-28

Applicant: Pacific Biosciences of California, Inc. ,  IMEC vzw

Inventor： Ravi SAXENA ,  Annette GROT ,  Nicolaas TACK ,  Pilar GONZALEZ ,  Bert DU BOIS ,  Simone SEVERI

IPC: C12Q1/68 ,  G01N21/78 ,  G02B27/09 ,  G02B5/28 ,  G02B3/00 ,  G02B5/18 ,  G01N21/64 ,  G02B5/20

CPC classification number: C12Q1/6874 ,  G01N21/6454 ,  G01N21/648 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6463 ,  G01N2021/6471 ,  G02B3/0006 ,  G02B5/1819 ,  G02B5/201 ,  G02B5/288 ,  G02B27/0944

Abstract: Arrays of integrated optical devices and their methods for production are provided. The devices include an integrated bandpass filter layer that comprises at least two multi-cavity filter elements with different central bandpass wavelengths. The device arrays are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The devices provide for the efficient and reliable coupling of optical excitation energy from an optical source to the optical reactions. Optical signals emitted from the reactions can thus be measured with high sensitivity and discrimination. The device arrays are well suited for miniaturization and high throughput.