公开(公告)号：DE10039928B4

公开(公告)日：2004-07-15

申请号：DE10039928

申请日：2000-08-16

Applicant: INFINEON TECHNOLOGIES AG

Inventor： HUEBNER MICHAEL ,  APPEN STEPHAN VON ,  KUND MICHAEL

IPC: G01R31/28 ,  G01R31/26 ,  H01L21/66 ,  H01R11/18

公开(公告)号：DE10039928A1

公开(公告)日：2002-03-21

申请号：DE10039928

申请日：2000-08-16

Applicant: INFINEON TECHNOLOGIES AG

Inventor： HUEBNER MICHAEL ,  APPEN STEPHAN VON ,  KUND MICHAEL

IPC: G01R31/28 ,  G01R31/26 ,  H01L21/66

公开(公告)号：DE102004035556B3

公开(公告)日：2005-12-08

申请号：DE102004035556

申请日：2004-07-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： APPEN STEPHAN VON

IPC: G01R31/28 ,  G01R31/319 ,  G01R35/00 ,  H01L21/66

Abstract: The invention relates to a device, in particular a probe card to be used for the testing of semi-conductor components, and/or a device, in particular a probe card, to be used in the calibration of a semi-conductor component test system and/or of a semi-conductor component test apparatus, a contact mechanism, in particular a wafer, as well as a process to be used in the calibration of a semi-conductor component test system and/or of a semi-conductor component test apparatus. The device and/or the probe card comprises a calibration device or parts of a calibration device, in particular a standard and/or reference comparator device and/or a standard and/or a reference driver device.