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1.发明专利
公开(公告)号：DE50115778D1
公开(公告)日：2011-03-03
申请号：DE50115778
申请日：2001-11-14
Applicant: INFINEON TECHNOLOGIES AG
Inventor： WEBER HANS DR , AHLERS DIRK DR , STENGL JENS-PEER , DEBOY GERALD DR , RUEB MICHAEL DR , MARION MIGUEL CUADRON , WILLMEROTH ARMIN
IPC: H01L29/06 , H01L21/336 , H01L29/10 , H01L29/78
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