-
公开(公告)号：DE19901002B4
公开(公告)日：2005-09-22
申请号：DE19901002
申请日：1999-01-13
Applicant: INFINEON TECHNOLOGIES AG
Inventor： WEINRICH VOLKER , ENGELHARDT MANFRED , DIENER WALTER
IPC: C23F1/02 , C23F4/00 , H01L21/02 , H01L21/306 , H01L21/3213 , H01L21/304 , C23F1/00 , H01L21/3065
Search Results
1
records
(took 0.022 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
