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公开(公告)号：DE102004021239A1
公开(公告)日：2005-11-17
申请号：DE102004021239
申请日：2004-04-30
Applicant: INFINEON TECHNOLOGIES AG
Inventor： KOERNER HEINRICH , HOMMEL MARTINA , AUBEL OLIVER , HASSE WOLFGANG
IPC: H01L21/768 , H01L23/522 , H01L23/532
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