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公开(公告)号：DE10048477A1
公开(公告)日：2002-04-25
申请号：DE10048477
申请日：2000-09-29
Applicant: INFINEON TECHNOLOGIES AG
Inventor： SAENGER ANNETTE , BEITEL GERHARD , MAINKA GERD , SCHNABEL FLORIAN
IPC: C09G1/02 , C23F3/00 , H01L21/321
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