公开(公告)号：DE10035421A1

公开(公告)日：2002-02-07

申请号：DE10035421

申请日：2000-07-20

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  LUEDER ELBRECHT ,  HERZOG THOMAS RAINER ,  MARKSTEINERN STEPHAN ,  NESSLER WINFRIED

IPC: H01L37/02 ,  H01L41/22 ,  H01L41/319 ,  H03H3/02 ,  H01L21/283 ,  H01L21/20 ,  H01L21/36 ,  H01L37/00 ,  H01L41/047 ,  H03H9/46

Abstract: At least one bottom electrode (U), a piezoelectric or pyroelectric layer (S) over said bottom electrode and a top electrode (O) over said layer are produced as parts of the layer sequence. The bottom electrode (U) is produced by depositing a conductive material and then chemically-mechanically polished in order to smooth out surface roughness. The thickness of the deposited conductive material is preferably reduced by 10 nm to 100 nm by the chemical-mechanical polishing process.