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公开(公告)号:AT348403T
公开(公告)日:2007-01-15
申请号:AT00960303
申请日:2000-07-24
Applicant: INFINEON TECHNOLOGIES AG
Inventor: ROEHL SIEGFRIED , VON BASSE PAUL-WERNER , SCHEITER THOMAS , SASSE THORSTEN , OPOLKA HEINZ
IPC: G01D5/24 , G06K9/00 , H01L21/314 , G06K9/20
Abstract: A conductor layer is patterned into flat portions, for example of a fingerprint sensor that effects capacitive measurement. The conductor layer is fragmented in a lattice-like manner by cutouts so that an applied passivation layer rests on a base layer that is present beneath the conductor layer. The interlaminar shear strength of the passivation is increased in this way.
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公开(公告)号:DE50013864D1
公开(公告)日:2007-01-25
申请号:DE50013864
申请日:2000-07-24
Applicant: INFINEON TECHNOLOGIES AG
Inventor: ROEHL SIEGFRIED , VON BASSE PAUL-WERNER , SCHEITER THOMAS , SASSE THORSTEN , OPOLKA HEINZ
IPC: H01L21/314 , G01D5/24 , G06K9/00 , G06K9/20
Abstract: A conductor layer is patterned into flat portions, for example of a fingerprint sensor that effects capacitive measurement. The conductor layer is fragmented in a lattice-like manner by cutouts so that an applied passivation layer rests on a base layer that is present beneath the conductor layer. The interlaminar shear strength of the passivation is increased in this way.
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