公开(公告)号：DE502004002981D1

公开(公告)日：2007-04-05

申请号：DE502004002981

申请日：2004-07-28

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BAUMGARTL JOHANNES ,  KOGLER RUDOLF ,  VALLANT THOMAS

IPC: H01L21/205 ,  B01F23/10 ,  C23C16/455 ,  C30B25/02 ,  C30B25/14 ,  F17C13/04

Abstract: The invention relates to a gas-supply assembly (10) for a process reactor (270). The gas-supply assembly (10) contains at least one changeover unit (420), a process-gas line (470) and an auxiliary line (460). The process reactor (270) contains at least one gas-inlet connection (404). A reactor line (450) lies between the changeover unit (420) and the gas-inlet connection (404). The reactor line (450) is shorter than one metre, producing excellent operating characteristics for the gas-supply assembly.

公开(公告)号：DE10337568A1

公开(公告)日：2005-03-17

申请号：DE10337568

申请日：2003-08-14

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BAUMGARTL JOHANNES ,  KOGLER RUDOLF ,  VALLANT THOMAS

IPC: B01F23/10 ,  C23C16/455 ,  C30B25/02 ,  C30B25/14 ,  H01L21/205

Abstract: The invention relates to a gas-supply assembly (10) for a process reactor (270). The gas-supply assembly (10) contains at least one changeover unit (420), a process-gas line (470) and an auxiliary line (460). The process reactor (270) contains at least one gas-inlet connection (404). A reactor line (450) lies between the changeover unit (420) and the gas-inlet connection (404). The reactor line (450) is shorter than one metre, producing excellent operating characteristics for the gas-supply assembly.