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公开(公告)号:DE19921113C2
公开(公告)日:2001-11-22
申请号:DE19921113
申请日:1999-05-07
Applicant: INFINEON TECHNOLOGIES AG
Inventor: MUENCH THOMAS , POHL JENS , WUTZ OLIVER
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公开(公告)号:DE19916071B4
公开(公告)日:2005-10-13
申请号:DE19916071
申请日:1999-04-09
Applicant: INFINEON TECHNOLOGIES AG
Inventor: POHL JENS , WUTZ OLIVER , WINDERL JOHANN
IPC: H01L21/78
Abstract: Semiconductor components, which each include at least one semiconductor chip mounted on a common carrier substrate, are singled. The separation is effected by severing of the carrier substrate. The carrier substrate is thereby bent at least in that area of the carrier substrate which is to be severed. The severing takes place beginning from the convexly curved surface of the carrier substrate. In addition, the invention describes a singling device for separating semiconductor components.
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