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公开(公告)号：DE10330459A1
公开(公告)日：2004-02-26
申请号：DE10330459
申请日：2003-07-05
Applicant: INFINEON TECHNOLOGIES AG , IBM
Inventor： DZIOBKOWSKI CHESTER , GOEBEL THOMAS , HUGHES BRIAN , IGGULDEN ROY C , IWATAKE MICHAEL M , MIURA DONNA D , ROBL WERNER , SHAFER PADRAIC , WONG KWONG HON , STRANE JAY W
IPC: H01L21/3205 , H01L21/768 , H01L21/283
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