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公开(公告)号：DE60007208D1
公开(公告)日：2004-01-29
申请号：DE60007208
申请日：2000-03-04
Applicant: INFINEON TECHNOLOGIES CORP
Inventor： TOEBBEN DIRK , LEE YONG GILL , LU ZHIJIAN
IPC: G03F7/004 , G03F7/09 , G03F7/11 , G03F7/26 , H01L21/027
Abstract: An ARC that reduces the reflectivity in the resist is described. The ARC comprises first and sections. The first section operates in the absorption mode and the second section reduces the difference in the refractive indices between the resist and first ARC section, thereby improving CD control.
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